Texturing of pure and doped CeO2 thin films by EBPVD through target engineering

被引:44
作者
Arunkumar, P. [1 ]
Ramaseshan, R. [2 ]
Dash, S. [2 ]
Basu, Joysurya [2 ]
Ravindran, T. R. [2 ]
Balakumar, S. [3 ]
Babu, K. Suresh [1 ]
机构
[1] Pondicherry Univ, Madanjeet Sch Green Energy Technol, Ctr Nanosci & Technol, Pondicherry 605014, India
[2] Indira Gandhi Ctr Atom Res, Kalpakkam 603102, Tamil Nadu, India
[3] Univ Madras, Natl Ctr Nanosci & Nanotechnol, Madras 600025, Tamil Nadu, India
关键词
ELECTROCHEMICAL PROPERTIES; ELECTRICAL-PROPERTIES; TRANSPORT-PROPERTIES; CERIA; DEPOSITION; CONDUCTIVITY; ELECTROLYTE; GROWTH; MICROSTRUCTURE; PRESSURE;
D O I
10.1039/c4ra04353g
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In this paper, we report the effect of annealing temperature of target on the texture of thin films coated by electron beam physical vapor deposition method. Nanocrystalline cerium oxide (CeO2) and 20 mol% samarium doped cerium oxide (SDC) powders, compacted into pellets, were used as targets after annealing at 300, 500 and 800 degrees C. Grain size analysis of the target by X-ray diffraction showed a size range of 12-52 nm and 9-22 nm for CeO2 and SDC, respectively. Texture coefficient calculation from glancing incident X-ray diffraction showed a preferential orientation of (111) in CeO2 films. However SDC films exhibited (200) orientation grown at the expense of (111) which resulted in higher residual strain with annealing temperature. The pole figure analysis elucidated smaller in-plane misorientation in CeO2 than in SDC films. Under similar deposition conditions, difference in textured growth between CeO2 and SDC is primarily induced by vapor pressure modifications associated with the annealing temperature of the target. Raman and X-ray photoelectron spectroscopic studies of the films indicate the presence of higher oxygen vacancy concentration in SDC as well as a decrease in Ce3+ concentration with target annealing temperature.
引用
收藏
页码:33338 / 33346
页数:9
相关论文
共 40 条
[1]   Raman spectroscopy of optical phonon confinement in nanostructured materials [J].
Arora, Akhilesh K. ;
Rajalakshmi, M. ;
Ravindran, T. R. ;
Sivasubramanian, V. .
JOURNAL OF RAMAN SPECTROSCOPY, 2007, 38 (06) :604-617
[2]   A review on cerium oxide-based electrolytes for ITSOFC [J].
Arunkumar, P. ;
Meena, M. ;
Babu, K. Suresh .
NANOMATERIALS AND ENERGY, 2012, 1 (05) :288-305
[3]   Dopant-mediated oxygen vacancy tuning in ceria nanoparticles [J].
Babu, Suresh ;
Thanneeru, Ranjith ;
Inerbaev, Talgat ;
Day, Richard ;
Masunov, Arteam E. ;
Schulte, Alfons ;
Seal, Sudipta .
NANOTECHNOLOGY, 2009, 20 (08)
[4]   A review on high power SOFC electrolyte layer manufacturing using thermal spray and physical vapour deposition technologies [J].
Coddet, Pierre ;
Liao, Han-lin ;
Coddet, Christian .
ADVANCES IN MANUFACTURING, 2014, 2 (03) :212-221
[6]  
Faro Massimiliano Lo, 2009, Journal of the Indian Institute of Science, V89, P363
[7]   TEXTURE TRANSITION IN THIN METAL-FILMS VACUUM CONDENSED ON GLASS - A GENERAL CONSIDERATION [J].
GRANTSCHAROVA, E .
THIN SOLID FILMS, 1993, 224 (01) :28-32
[8]   UV and Visible Raman Studies of Oxygen Vacancies in Rare-Earth-Doped Ceria [J].
Guo, Ming ;
Lu, Jiqing ;
Wu, Yanni ;
Wang, Yuejuan ;
Luo, Mengfei .
LANGMUIR, 2011, 27 (07) :3872-3877
[9]   Optimization of DC Reactive Magnetron Sputtering Deposition Process for Efficient YSZ Electrolyte Thin Film SOFC [J].
Hidalgo, H. ;
Thomann, A. -L. ;
Lecas, T. ;
Vulliet, J. ;
Wittmann-Teneze, K. ;
Damiani, D. ;
Millon, E. ;
Brault, P. .
FUEL CELLS, 2013, 13 (02) :279-288
[10]   Effect of the substrate temperature in ZrN coatings grown by the pulsed arc technique studied by XRD [J].
Jimenez, H. ;
Restrepo, E. ;
Devia, A. .
SURFACE & COATINGS TECHNOLOGY, 2006, 201 (3-4) :1594-1601