Chemical states and magnetic properties of (Co-Fe)-Al-O thin films

被引：2

作者：

Kondo, R ^{[1
]}

Ikeda, K ^{[1
]}

Kobayashi, K ^{[1
]}

Fujimoto, M ^{[1
]}

机构：

[1] Taiyo Yuden Co Ltd, Gunma 3703347, Japan

来源：

JOURNAL OF THE CERAMIC SOCIETY OF JAPAN | 2002年 / 110卷 / 07期

关键词：

Co-Fe alloy; nano-granular; XPS; chemical states; magnetic properties; resistivity; oxidation;

D O I：

10.2109/jcersj.110.614

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The chemical states of (Co-Fe)-Al-O magnetic thin films with various compositional ratios were investigated by X-ray photoelectron spectroscopy (XPS). Samples were prepared by using inductively coupled RF sputtering. A non-reactive Ar atmosphere for both a Co-Fe alloy target and an Al2O3 ceramic target was used. Compositions of samples were varied to control the cathode power of the Co-Fe alloy target. Those with high (Co-Fe) / (Al-O) volume ratios exhibited excellent saturation magnetization (M-s) arising from the ideal chemical state of the non-oxidised Co-Fe alloy. Samples with low (Co-Fe) / (Al-O) volume ratios highlighted a problem that the increase in volume of the Al-O layer could cause some degree of Fe oxidation in the Co-Fe alloy, which would lead to a decrease of M-s.

引用

页码：614 / 617

页数：4

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