Nanostructured TiO2 films: Enhanced NH3 detection at room temperature

被引：74

作者：

Dhivya, P. ^{[1
,2
]}

Prasad, Arun K. ^{[3
]}

Sridharan, M. ^{[1
,2
]}

机构：

[1] SASTRA Univ, Ctr Nanotechnol & Adv Biomat, Funct Nanomat & Device Lab, Thanjavur 613401, India

[2] SASTRA Univ, Sch Elect & Elect Engn, Thanjavur 613401, India

[3] Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, India

来源：

CERAMICS INTERNATIONAL | 2014年 / 40卷 / 01期

关键词：

Films; TiO2; Sensors; Sensitivity; GAS-SENSING PROPERTIES; THIN-FILMS; SENSORS; NANOCOMPOSITE; SENSITIVITY; PRESSURE; METAL;

D O I：

10.1016/j.ceramint.2013.06.016

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The influence of substrate bias on the ammonia (NH3) sensing properties of reactive dc magnetron sputtered titanium dioxide (TiO2) films has been investigated. The films deposited at floating potential and -100 V substrate bias exhibited a mixed phase (anatase and ruffle) as analysed by X-ray diffraction (XRD) while the films deposited at -200 V substrate bias had only futile phase. On increasing the substrate bias voltage the grain size increased from 15 to 31 nm and the optical band gap value decreased. The TiO2 films had an enhanced response towards NH3 in the concentration range 5-100 ppm at room temperature. The enhanced performances are correlated to the high surface-to-bulk ratio and crystal structure. The TiO2 film deposited at lower bias has enhanced sensitivity of (S-7857) towards NH3 at room temperature with quick response and recovery time. (C) 2013 Elsevier Ltd and Techna Group S.r.l. All rights reserved.

引用

页码：409 / 415

页数：7

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