Ultraviolet light imprinted sol-gel silica glass waveguide devices on silicon

被引：45

作者：

Coudray, P

Chisham, J

MalekTabrizi, A

Li, CY

Andrews, MP

Peyghambarian, N

Najafi, SI

机构：

[1] MCGILL UNIV,DEPT CHEM,MONTREAL,PQ H3A 2K6,CANADA

[2] UNIV ARIZONA,CTR OPT SCI,TUCSON,AZ 85721

来源：

OPTICS COMMUNICATIONS | 1996年 / 128卷 / 1-3期

基金：

加拿大自然科学与工程研究理事会; 美国国家科学基金会;

关键词：

D O I：

10.1016/0030-4018(96)00101-0

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe a new simplified process for inexpensive fabrication of low-loss (0.1 dB/cm) glass waveguides on silicon by ultraviolet light imprinting in photosensitive, organically modified sol-gel silica glass films prepared by one-step dip-coating process. The fabrication process is appealing because the buffer layer between waveguide and substrate is eliminated, and waveguides can be made in a few steps using low-cost equipment. Also, a 1 x 8 power splitter is produced by this process. The splitter exhibits relatively uniform output and a configuration loss of 0.9 dB at 1.55 mu m wavelength.

引用

页码：19 / 22

页数：4