The Research and Design of Axial Symmetry Resonant MEMS Gyroscope

被引：0

作者：

Wang, C. ^{[1
]}

Zhang, W. ^{[1
]}

Tang, J. ^{[1
]}

Liu, Y. ^{[1
]}

Xing, Y. ^{[1
]}

Cui, F. ^{[1
]}

Liu, W. ^{[1
]}

Cheng, Y. ^{[2
]}

Zhao, W. ^{[2
]}

Li, S. ^{[2
]}

机构：

[1] Shanghai Jiao Tong Univ, Shanghai Key Lab Nav & Locat Based Serv,Minist Ed, Sch Elect Informat & Elect Engn,Dept Micronano El, Natl Key Lab Sci & Technol,Micro Nano Fabricat La, Shanghai 200240, Peoples R China

[2] Shanghai Aerosp Control Technol Res Inst, Shanghai 201109, Peoples R China

来源：

MICRO-NANO TECHNOLOGY XVII-XVIII | 2018年

基金：

中国国家自然科学基金;

关键词：

Vibratory gyroscope; Axial symmetry; MEMS;

D O I：

暂无

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

MEMS vibratory gyroscope has been widely used in military, automotive, and consumer electronics fields for its small size, low power consumption, high reliability, and impact resistance. Particularly, as one of the main directions of domestic and foreign research in the field of micro-gyroscope, the axial symmetry micro vibration gyroscope has higher quality factor, smaller frequency division and many other excellent characteristics. This paper gives a brief introduction of several typical structures of axial symmetry micro vibration gyroscope, then introduces the simulation and testing experiments of some axial symmetry micro vibration gyroscope we designed.

引用

页码：89 / 95

页数：7

共 6 条

[1] THE THEORY OF A PIEZOELECTRIC DISK GYROSCOPE [J].