共 12 条
[1]
Nanofabrication and diffractive optics for high-resolution x-ray applications
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2000, 18 (06)
:2970-2975
[3]
Edelstein D., 1997, P IEEE INT EL DEV M, P773
[4]
HU CK, 1999, P ELECTROCHEM SOC, V31, P206
[6]
Power supply distribution and other wiring issues for deep-submicron IC's
[J].
ADVANCED INTERCONNECTS AND CONTACT MATERIALS AND PROCESSES FOR FUTURE INTEGRATED CIRCUITS,
1998, 514
:11-27
[7]
MEYER MA, 2002, IN PRESS P MAM C
[8]
MEYERILSE W, 1995, SYNCHROTRON RAD NEWS, V8, P23
[9]
Substrate cooling efficiency during cryogenic inductively coupled plasma polymer etching for diffractive optics on membranes
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2001, 19 (06)
:2896-2900