Atomic layer growth on Al(111) by ion bombardment

被引:38
|
作者
Busse, C [1 ]
Hansen, H
Linke, U
Michely, T
机构
[1] Rhein Westfal TH Aachen, Inst Phys 1, D-52056 Aachen, Germany
[2] Forschungszentrum Julich, IGV, D-52425 Julich, Germany
关键词
D O I
10.1103/PhysRevLett.85.326
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Instead of the expected erosion morphology composed of craters, rare gas ion bombardment of the, Al(111) surface is found to cause initial surface growth of several atomic layers. This phenomenon is observed for Ne+, Ar+. and Xe+ at all temperatures at which bombardment induces morphological surface changes and for ion energies down to a few hundred eV. Thr effect is interpreted on the basis of a thermal spike induced separation of damage into subsurface vacancy clusters and surface allatum clusters.
引用
收藏
页码:326 / 329
页数:4
相关论文
共 50 条
  • [31] New insight into desorption step by Ar+ ion-bombardment during the atomic layer etching of silicon
    Sherpa, Sonam D.
    Ventzek, Peter L. G.
    Lee, Myungsuk
    Hwang, Gyeong S.
    Ranjan, Alok
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2018, 36 (03):
  • [32] Growth of a near-atomic protrusion on molybdenum field emitter tips under argon ion bombardment
    Okuyama, F
    Sugie, H
    Sato, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (04): : 1602 - 1604
  • [33] RECOVERY PROCESSES OF SI (111) AND GE (111) SURFACES DAMAGED BY ARGON ION-BOMBARDMENT
    ICHIKAWA, T
    INO, S
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (09) : 1675 - 1676
  • [34] Morphology of an oxide layer on aluminum after ion bombardment
    Ashkhotov O.G.
    Ashkhotova I.B.
    Bliev A.P.
    Magkoev T.T.
    Bulletin of the Russian Academy of Sciences: Physics, 2015, 79 (11) : 1383 - 1385
  • [35] From erosion to bombardment-induced growth on Ir(111)
    Petersen, A
    Busse, C
    Polop, C
    Linke, U
    Michely, T
    PHYSICAL REVIEW B, 2003, 68 (24):
  • [36] Roughness evolution of Si(111) by low-energy ion bombardment
    Chan, ACT
    Wang, GC
    SURFACE SCIENCE, 1998, 414 (1-2) : 17 - 25
  • [37] Structure and strain of CdS nanofilms on Au(111) during electrochemical atomic layer deposition growth
    Snelgrove, M.
    Morris, A.
    O'Neill, D.
    Carla, F.
    APPLIED SURFACE SCIENCE, 2024, 649
  • [38] A reversion of atomic segregation under ion bombardment of NixPdy alloys
    Chernysh, V. S.
    Patrakeev, A. S.
    Shulga, V. I.
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 2008, 163 (07): : 597 - 603
  • [39] SPUTTERING OF SILVER BY HEAVY ATOMIC AND MOLECULAR ION-BOMBARDMENT
    THOMPSON, DA
    JOHAR, SS
    NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3): : 281 - 285
  • [40] Cluster ion bombardment on atomically flat Au(111) solid surfaces
    Takeuchi, D
    Seki, T
    Aoki, T
    Matsuo, J
    Yamada, I
    MATERIALS CHEMISTRY AND PHYSICS, 1998, 54 (1-3) : 76 - 79