共 7 条
[2]
FELDMAN LC, 1989, MATERIALS ANAL ION C, pCH4
[3]
DRY ETCH PROCESSING OF GAAS/-ALGAAS HIGH ELECTRON-MOBILITY TRANSISTOR STRUCTURES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1991, 9 (05)
:2487-2496
[5]
INVESTIGATION OF PLASMA ETCH INDUCED DAMAGE IN COMPOUND SEMICONDUCTOR-DEVICES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1994, 12 (04)
:1351-1355