共 34 条
[1]
[Anonymous], 2006, Semiconductor Material and Device Characterization, DOI DOI 10.1002/0471749095
[2]
[Anonymous], 1975, Optical processes in semiconductors
[4]
Fast, high resolution, inline contactless electrical semiconductor characterization for photovoltaic applications by microwave detected photoconductivity
[J].
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS,
2013, 178 (09)
:676-681
[5]
Hemenway C. L., 1962, PHYS ELECT
[6]
Ibuka S., 2001, MRS P, V681
[7]
Visualization of Plasma Etching Damage of Si Using Room Temperature Spectroscopic Photoluminescence
[J].
SILICON COMPATIBLE MATERIALS, PROCESSES, AND TECHNOLOGIES FOR ADVANCED INTEGRATED CIRCUITS AND EMERGING APPLICATIONS 3,
2013, 53 (03)
:167-176