Pattern stability in diffraction of light from structures with self-similarity symmetry

被引：8

作者：

Korolenko, P. V. ^{[1
]}

Ryzhikov, S. B. ^{[1
]}

Ryzhikova, Yu. V. ^{[1
]}

机构：

[1] Moscow MV Lomonosov State Univ, Fac Phys, Moscow 119991, Russia

来源：

PHYSICS OF WAVE PHENOMENA | 2013年 / 21卷 / 04期

关键词：

TECHNOLOGY; ELEMENTS;

D O I：

10.3103/S1541308X13040031

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A method for determining the structural features of 1D-3D aperiodic diffraction gratings with self-similarity symmetry has been proposed and substantiated. This method is based on the analysis of local patterns in scaling characteristics of diffracted waves. The stability of patterns to changes in grating illumination conditions and the presence of defects in gratings is estimated.

引用

页码：256 / 260

页数：5

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