Deep levels in He++ irradiated Be-doped Al0.5Ga0.5As MBE layers

被引:3
作者
Szatkowski, J
Placzek-Popko, E
Sieranski, K
Hansen, OP
Johansen, A
Soerensen, C
机构
[1] Wroclaw Tech Univ, Inst Phys, PL-50370 Wroclaw, Poland
[2] Univ Copenhagen, Oersted Lab, DK-2100 Copenhagen, Denmark
关键词
AlGaAs; deep levels; DX centers;
D O I
10.1016/S0921-4526(99)00620-1
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
He++ irradiation induced defects in Be-doped Al-0.5 Ga-0.5 As MBE layers have bean studied using the DLTS method. The samples were irradiated by He++ ions of an energy equal to 0.5 MeV and fluence of 10(12) cm(-2). In irradiated samples, persistent photocapacitance was observed after illumination of the samples at the liquid nitrogen ambient. Defect (or defects) introduced during irradiation can be responsible for the observed persistent photocapacitance effect. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:718 / 721
页数:4
相关论文
共 9 条
[1]   ELECTRICAL CHARACTERIZATION OF DEFECTS INTRODUCED IN N-GAAS BY ALPHA-IRRADIATION AND BETA-IRRADIATION FROM RADIONUCLIDES [J].
AURET, FD ;
GOODMAN, SA ;
MYBURG, G ;
MEYER, WE .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1993, 56 (06) :547-553
[2]   NEW ELECTRON-IRRADIATION-INDUCED ELECTRON TRAP IN EPITAXIALLY GROWN SI-DOPED N-GAAS [J].
AURET, FD ;
GOODMAN, SA ;
MEYER, WE .
APPLIED PHYSICS LETTERS, 1995, 67 (22) :3277-3279
[3]   A MONTE-CARLO COMPUTER-PROGRAM FOR THE TRANSPORT OF ENERGETIC IONS IN AMORPHOUS TARGETS [J].
BIERSACK, JP ;
HAGGMARK, LG .
NUCLEAR INSTRUMENTS & METHODS, 1980, 174 (1-2) :257-269
[4]  
Ryc L., 1996, Proceedings of the International Conference on Advanced Semiconductor Devices and Microsystems. ASDAM '96, P141
[5]   Deep hole traps in Be-doped Al0.5Ga0.5As layers grown by molecular beam epitaxy [J].
Szatkowski, J ;
Placzek-Popko, E ;
Sieranski, K ;
Hansen, OP .
JOURNAL OF APPLIED PHYSICS, 1999, 86 (03) :1433-1438
[6]   DLTS study of Be-doped p-type AlGaAs/GaAs MBE layers [J].
Szatkowski, J ;
Placzek-Popko, E ;
Sieranski, K ;
Hansen, OP .
ACTA PHYSICA POLONICA A, 1998, 94 (03) :565-569
[7]   Deep hole traps in Be-doped Al0.5Ga0.5 As MBE layers [J].
Szatkowski, J ;
Placzek-Popko, E ;
Sieranski, K ;
Hansen, OP .
DEFECTS IN SEMICONDUCTORS - ICDS-19, PTS 1-3, 1997, 258-2 :1653-1658
[8]  
SZATKOWSKI J, 1997, I PHYS C SER, V152, P789
[9]   STUDY OF DEEP HOLE AND ELECTRON TRAPS IN NITROGEN-DOPED ZNSE BY ISOTHERMAL CAPACITANCE TRANSIENT SPECTROSCOPY AND DEEP-LEVEL TRANSIENT SPECTROSCOPY [J].
TANAKA, K ;
ZHU, ZQ ;
YAO, T .
APPLIED PHYSICS LETTERS, 1995, 66 (24) :3349-3351