Development of local evacuation system for inhibiting oxidization in atmospheric-pressure plasma jet nitriding

被引：4

作者：

Chiba, Seiga ^{[1
]}

Ichiki, Ryuta ^{[1
]}

Nakatani, Tatsuyuki ^{[2
]}

Ueno, Takahisa ^{[3
]}

Kanazawa, Seiji ^{[1
]}

机构：

[1] Oita Univ, Div Elect & Elect Engn, Oita 8701192, Japan

[2] Okayama Univ Sci, Res Inst Technol, Okayama 7000005, Japan

[3] Oita Coll, Dept Elect & Elect Engn, Natl Inst Technol, Oita 8700152, Japan

来源：

RESULTS IN PHYSICS | 2019年 / 13卷

基金：

日本科学技术振兴机构;

关键词：

Plasma nitriding; Atmospheric-pressure plasma; Oxidation; Vacuum purge; SURFACE;

D O I：

10.1016/j.rinp.2019.02.067

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

To inhibit oxidization during nitriding process using the atmospheric-pressure plasma jet, we developed a local evacuation system. By this system, we perform vacuum purge in the treatment atmosphere locally to reduce residual oxygen. As a result, the oxide layer undesirably formed during nitriding process becomes thinner by vacuum purge.

引用

页数：3

共 6 条

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