III-V diluted magnetic semiconductor Ga1-xCrxAs was successfully synthesized by low-temperature molecular beam epitaxy. High-quality twin-free films were grown with Cr concentrations up to x = 0.05 under an AS(4)/Ga beam flux ratio similar to40. The films showed local ferromagnetic ordering at T < 30 K. With higher Cr concentrations or lower As-4/Ga beam flux ratios, the film quality degraded. (C) 2002 Elsevier Science B.V. All rights reserved.