A High-Performance Pd Nanoparticle (NP)/WO3 Thin-Film-Based Hydrogen Sensor

被引：23
作者：
Lee, Cheng [1 ]
Liu, Wen-Chau [1 ]
机构：
[1] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Tainan 70101, Taiwan
来源：
IEEE ELECTRON DEVICE LETTERS | 2019年 / 40卷 / 07期
关键词：
Hydrogen sensor; Pd; nanoparticle (NP); WO3; sensing response; SENSING CHARACTERISTICS; H-2; GAS; WO3; AU; NIO;
D O I：
10.1109/LED.2019.2915537
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new and high-performance Pd nanoparticle (NP)/WO3 thin-film-based sensor is fabricated by vacuum thermal evaporation (VTE) and RF sputtering herein. Based on the remarkable catalytic activity of Pd NPs and high-quality WO3 thin film (20 nm in thickness), excellent hydrogen sensing properties, including a very high sensing response of 1.8 x 10(4) (in 1000 ppm H-2/air gas at 175 degrees C), an extremely low detecting level (<= 5 ppm H-2/air), a relatively low optimal operating temperature of 175 degrees C, and a fast sensing speed, are obtained. In addition, the studied Pd NP/WO3-based device shows the advantages of simple structure, low cost, and easy fabrication process. The studied device is, therefore, promising for high-performance hydrogen sensing applications.
引用
收藏
页码：1194 / 1197
页数：4
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