ZnO Nanorod-Based Humidity Sensors With Fast Response

被引：11

作者：

Jung, Soyoun ^{[1
]}

Ji, Taeksoo ^{[2
]}

机构：

[1] Samsung Display Co Ltd, Yongin 440711, South Korea

[2] Chonnam Natl Univ, Sch Elect & Comp Engn, Kwangju 500757, South Korea

来源：

IEEE ELECTRON DEVICE LETTERS | 2014年 / 35卷 / 09期

关键词：

Wheatstone bridge; zinc oxide; nanorods; humidity sensor;

D O I：

10.1109/LED.2014.2335231

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Humidity sensors based on ZnO nanorods (NRs) have been developed using a Wheatstone bride (WB) configuration, where the ZnO NRs were selectively grown onto the one quadrant of the WB circuit. It turns out that the WB-based sensor possesses superior performances in terms of response and recovery time, and thermal stability in comparison with conventional types of resistive sensors. Thus, the WB sensor exhibits a fast response and recovery time (similar to 1 s), and temperature-invariant behaviors over a broad range of temperatures up to 180 degrees C, which is likely because of the self-calibrating and error correction capabilities of the WB circuit itself.

引用

收藏

页码：960 / 962

页数：3

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