Microscopic topographical analysis of tool vibration effects on diamond turned optical surfaces

被引：73

作者：

Kim, DS ^{[1
]}

Chang, IC ^{[1
]}

Kim, SW ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, BUPE Creat Res Initiat Grp, Taejon 305701, South Korea

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2002年 / 26卷 / 02期

关键词：

diamond turning; surface analysis; tool vibration; topography;

D O I：

10.1016/S0141-6359(01)00115-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In diamond turning for the manufacture of optical surfaces, a certain degree of relative vibration is inevitably encountered between the tool and work, deteriorating the surface quality. In this paper we first describe how the tool vibration affects the surface profiles in microscopic level, and then propose a metrological scheme to identify any existence of tool vibration with a minimum effort of surface measurement and analysis. (C) 2002 Elsevier Science Inc. All rights reserved.

引用

页码：168 / 174

页数：7