Ion velocities and electron temperature distribution in erosion plume under ablation of copper with excimer laser in vacuum

被引:0
作者
Novodvorsky, OA [1 ]
Khramova, OD
Filippova, EO
Shevelev, AK
Wenzel, C
Bartha, JW
机构
[1] Russian Acad Sci, Inst Laser & Informat Technol Problem, Shatura, Russia
[2] Dresden Univ Technol, D-8027 Dresden, Germany
[3] Dresden Semicond & Microsyst Technol Inst, Dresden, Germany
来源
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA | 2002年 / 66卷 / 08期
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中图分类号
O4 [物理学];
学科分类号
0702 ;
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页码:1159 / 1161
页数:3
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