Laser fabrication of micro-fluidic devices

被引：0
|
作者：
Kim, J [1 ]
Xu, XF [1 ]
机构：
[1] Purdue Univ, Sch Mech Engn, W Lafayette, IN 47907 USA
来源：
20TH ICALEO 2001, VOLS 92 & 93, CONGRESS PROCEEDINGS | 2001年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper describes using laser ablation of polymers for fabricating micro-fluidic channels in MEMS devices. Micro-fluidic channels are machined on polymers with a KrF excimer laser (lambda = 248nm). Mask patterning and direct laser writing techniques are used. A silicon-on-glass (SOG) process and an infrared (IR) laser bonding process are applied to assemble the machined parts with transparent cover glasses or plastics. Several micro-fluidic devices, including a single channel chip, a cross-shaped microchip, and a micro filter array are fabricated. The relative advantages and disadvantages of each technique are discussed.
引用
收藏
页码：1679 / 1688
页数：10
相关论文
共 50 条
  • [41] Surface roughness analysis and improvement of micro-fluidic channel with excimer laser
    Heng, Qi
    Tao, Chen
    Zuo Tie-chuan
    MICROFLUIDICS AND NANOFLUIDICS, 2006, 2 (04) : 357 - 360
  • [42] Micro-fluidic photonic crystal vertical cavity surface emitting laser
    Samakkulam, K.
    Sulkin, J.
    Giannopoulos, A.
    Choquette, K. D.
    ELECTRONICS LETTERS, 2006, 42 (14) : 809 - 811
  • [43] Fabrication of 3-D high aspect ratio micro-fluidic components using laser machining and LIGA
    Ghantasala, MK
    Barber, RC
    Moldovan, N
    Mancini, DC
    Harvey, EC
    SMART MATERIALS, STRUCTURES, AND SYSTEM, PTS 1 AND 2, 2003, 5062 : 342 - 346
  • [44] Integrating Optics and Micro-fluidic Channels Using Femtosecond Laser Irradiation
    Anderson, T.
    Hu, J.
    Ramme, M.
    Choi, J.
    Faris, C.
    Carlie, N.
    Agarwal, A.
    Petit, L.
    Kimerling, L.
    Richardson, K.
    Richardson, M.
    COMMERCIAL AND BIOMEDICAL APPLICATIONS OF ULTRAFAST LASERS IX, 2009, 7203
  • [45] Surface roughness analysis and improvement of micro-fluidic channel with excimer laser
    Qi Heng
    Chen Tao
    Zuo Tie-chuan
    Microfluidics and Nanofluidics, 2006, 2 : 357 - 360
  • [46] Silver/silver-chloride electrode fabrication in closed micro-fluidic capillaries
    Heuck, Friedjof
    Staufer, Urs
    MICROELECTRONIC ENGINEERING, 2010, 87 (5-8) : 1383 - 1385
  • [47] Fabrication of low-temperature co-fired ceramics micro-fluidic devices using sacrificial carbon layers
    Birol, H
    Maeder, T
    Jacq, C
    Straessler, S
    Ryser, P
    INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY, 2005, 2 (05) : 364 - 373
  • [48] Micro-fluidic diffusion coefficient measurement
    Galambos, P
    Forster, FK
    MICRO TOTAL ANALYSIS SYSTEMS '98, 2000, : 189 - 192
  • [49] New micro-fluidic devices with polymeric materials for isolation of circulating tumor cells
    Shimada, Yutaka
    Onaga, Takashi
    Moriyama, Makoto
    Okumura, Tomoyuki
    Sekine, Shinichi
    Obata, Tsutomu
    Kishi, Hiroyuki
    Fukuoka, Junya
    Hori, Takashi
    Nagata, Takuya
    Tsukada, Kazuhiro
    CANCER RESEARCH, 2012, 72
  • [50] Characterization and Analysis of Micro-fluidic VCSELs
    Sulkin, Joshua D.
    Kasten, Ansas M.
    Siriani, Dominic F.
    Choquette, Kent D.
    2008 CONFERENCE ON LASERS AND ELECTRO-OPTICS & QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE, VOLS 1-9, 2008, : 496 - 497
12345