Laser fabrication of micro-fluidic devices

被引：0
|
作者：
Kim, J [1 ]
Xu, XF [1 ]
机构：
[1] Purdue Univ, Sch Mech Engn, W Lafayette, IN 47907 USA
来源：
20TH ICALEO 2001, VOLS 92 & 93, CONGRESS PROCEEDINGS | 2001年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper describes using laser ablation of polymers for fabricating micro-fluidic channels in MEMS devices. Micro-fluidic channels are machined on polymers with a KrF excimer laser (lambda = 248nm). Mask patterning and direct laser writing techniques are used. A silicon-on-glass (SOG) process and an infrared (IR) laser bonding process are applied to assemble the machined parts with transparent cover glasses or plastics. Several micro-fluidic devices, including a single channel chip, a cross-shaped microchip, and a micro filter array are fabricated. The relative advantages and disadvantages of each technique are discussed.
引用
收藏
页码：1679 / 1688
页数：10
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