Laser fabrication of micro-fluidic devices

This paper describes using laser ablation of polymers for fabricating micro-fluidic channels in MEMS devices. Micro-fluidic channels are machined on polymers with a KrF excimer laser (lambda = 248nm). Mask patterning and direct laser writing techniques are used. A silicon-on-glass (SOG) process and an infrared (IR) laser bonding process are applied to assemble the machined parts with transparent cover glasses or plastics. Several micro-fluidic devices, including a single channel chip, a cross-shaped microchip, and a micro filter array are fabricated. The relative advantages and disadvantages of each technique are discussed.