Binary Superimposed Gratings Formed by e-Beam Recording in Amorphous AsS Films

被引：3
作者：
Sergeev, S. A. [1 ]
Iovu, M. S. [1 ]
Enachi, M. A. [2 ]
机构：
[1] Inst Appl Phys, MD-2028 Kishinev, Moldova
[2] Natl Ctr Mat Study & Testing, MD-2012 Kishinev, Moldova
来源：
JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS | 2014年 / 9卷 / 02期
关键词：
e-Beam Recording; Superimposed Gratings; Diffraction Efficiency; Relief Structure; PHOTONIC CRYSTALS; THIN-FILMS; FABRICATION;
D O I：
10.1166/jno.2014.1583
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Binary unidirectional superimposed diffraction gratings with grating periods of 0.9 mu m and 1 mu m were formed in amorphous AsS films by e-beam recording. The influence of recording sequence of index superimposed gratings on their diffraction efficiency was evidenced. Enhancement of diffraction efficiencies of index superimposed gratings as compared to single gratings was revealed. Relief structures of superimposed gratings were fabricated by chemical etching. The surface relief modulation was studied by atomic force microscope. A beat period of 9 mu m for relief complex structure was observed. The highest depth of relief modulation was about 70-80 mu m.
引用
收藏
页码：291 / 294
页数：4
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