Optical characterization of adaptive fluidic silicone-membrane lenses

被引:60
作者
Schneider, Florian [1 ]
Draheim, Jan [1 ]
Kamberger, Robert [1 ]
Waibel, Philipp [2 ]
Wallrabe, Ulrike [1 ]
机构
[1] Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Microactuators, D-79110 Freiburg, Germany
[2] Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Microopt, D-79110 Freiburg, Germany
来源
OPTICS EXPRESS | 2009年 / 17卷 / 14期
关键词
(080.3630) Lenses; (110.1080) Active or adaptive optics;
D O I
10.1364/OE.17.011813
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present an extended optical characterization of an adaptive microfluidic silicone-membrane lens at a wavelength of 633 nm, respectively 660 nm. Two different membrane variations; one with a homogeneous membrane thickness, and one with a shaped cross section, have been realized. This paper includes the theoretical predictions of the optical performance via FEM simulation and ray tracing, and a subsequent orientation dependent experimental analysis of the lens quality which is measured with an MTF setup and a Mach-Zehnder interferometer. The influence of the fabrication process on the optical performance is also characterized by the membrane deformation in the non-deflected state. The lens with the homogeneous membrane of 5 mm in diameter and an aperture of 2.5 mm indicates an almost orientation independent image quality of 117 linepairs/mm at a contrast of 50%. The shaped membrane lenses show a minimum wave front error of WFERMS = 24 nm, and the lenses with a planar membrane of WFERMS = 31 nm at an aperture of 2.125 mm. (C) 2009 Optical Society of America
引用
收藏
页码:11813 / 11821
页数:9
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