Improved equivalent circuits for acoustic plate wave devices

This paper presents improved equivalent circuits for the analysis and design of acoustic plate wave devices. The method uses a mixed equivalent circuit for the interdigital transducer consisting of both active and passive sections placed on the surface of a piezoelectric plate. The values of the various circuit elements are obtained by carrying out a best fit between theoretical and experimental frequency dependence of the real and imaginary parts of transducer input impedance. Knowledge of the equivalent circuit parameters allows one to optimize design of the devices. The method has been successfully employed for the design of one-port shear-horizontal wave resonators on Y-X lithium niobate plates. The proposed method can also be utilized for determining acoustic wave velocity with high accuracy. (C) 2002 Elsevier Science B.V. All rights reserved.