Laser produced Ag ions for direct implantation

被引：70

作者：

Woryna, E

Wolowski, J

Králiková, B

Krása, J

Láska, L ^{[1
]}

Pfeifer, M

Rohlena, K

Skála, J

Perina, V

Boody, FP

Höpfl, R

Hora, H

机构：

[1] Acad Sci Czech Republ, Inst Phys, Prague 18221 8, Czech Republic

[2] Acad Sci Czech Republ, Inst Nucl Phys, Rez 25068, Czech Republic

[3] Ion Light Technol GmbH, D-93077 Bad Abbach, Germany

[4] Fachsch Deggendorf, D-94469 Deggendorf, Germany

[5] Univ New S Wales, Sydney, NSW 2052, Australia

[6] Inst Plasma Phys & Laser Microfus, PL-00908 Warsaw, Poland

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2000年 / 71卷 / 02期

关键词：

D O I：

10.1063/1.1150354

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The amount and properties of ions produced by laser ablation of Ag targets have been analyzed. The maximum ion current density j(max)=21.0 mA and maximum charge state Ar37+ of the ions produced by a laser power density of about 1x10(14) W cm(-2) at 1.315 and 0.657 mu m on an Ag target have been determined. Direct implantation of the Ag ions from the laser-produced plasma has also been studied. An implanted ion density of 3.5x10(16) cm(-2) at a depth of 500 nm in Al samples was determined by RBS. (C) 2000 American Institute of Physics. [S0034-6748(00)63302-6].

引用

页码：949 / 951

页数：3

共 18 条

[1] Laser-driven ion source for reduced-cost implantation of metal ions for strong reduction of dry friction and increased durability [J].

Boody, FP ;

Hopel, R ;

Hora, H ;

Kelly, JC .

LASER AND PARTICLE BEAMS, 1996, 14 (03) :443-448

[2]

BOODY FP, 1997, AIP C P, V406, P539

[3]

BOODY FP, 1996, P CLEO EUROPE EQEC 9

[4] INTENSE ION-BEAMS FROM LASER-PLASMA - PRODUCTION AND APPLICATION [J].

BYKOVSKY, YA ;

TSYBIN, AS ;

KOZLOVSKY, KI ;

SHIKANOV, AE .

APPLIED RADIATION AND ISOTOPES, 1995, 46 (6-7) :723-724

[5] Evidence for a strong correlation between the amount of surface carbon and the tribological behaviour of ion-treated steels [J].

Faussemagne, A ;

Benyagoub, A .

EUROPHYSICS LETTERS, 1998, 41 (04) :449-454

[6] PULSED ION-BEAMS FOR MODIFICATION OF METAL-SURFACE PROPERTIES [J].

FOMINSKII, VY ;

MARKEEV, AM ;

NEVOLIN, VN .

VACUUM, 1991, 42 (1-2) :73-74

[7]

HOPFL R, 1965, Patent No. 125660

[8] Multiply charged ions from iodine laser-produced plasma of medium- and high-Z targets [J].

Krasa, J ;

Laska, L ;

Masek, K ;

Pfeifer, M ;

Kralikova, B ;

Skala, J ;

Straka, P ;

Rohlena, K ;

Mroz, W ;

Woryna, E ;

Parys, P ;

Wolowski, J ;

Haseroth, H ;

Golubev, AA ;

Sharkov, BY .

LASER AND PARTICLE BEAMS, 1998, 16 (01) :5-12

[9]

KRASA J, 1999, P 24 INT C PHEN ION, V2, P103

[10]

KRASA J, 1999, P 12 INT C HIGH POW, V1, P41

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