共 50 条
- [41] NUMERICAL-ANALYSIS OF DEPOSITION RATES OF ZIRCONIUM THIN-FILMS BY THERMAL CHEMICAL VAPOR-DEPOSITION NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1992, 100 (03): : 266 - 271
- [43] Deposition and gas sensing properties of tin oxide thin films by inductively coupled plasma chemical vapor deposition Journal of Electroceramics, 2006, 16 : 507 - 509
- [45] Branched nozzle oblique angle flow for initiated chemical vapor deposition JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2023, 41 (03):