Atomic Layer Deposition of SnO2 for Selective Room Temperature Low ppb Level O3 Sensing

被引：22
作者：
Mills, Steven [1 ]
Lim, Michael [1 ]
Lee, Bongmook [1 ]
Misra, Veena [1 ]
机构：
[1] N Carolina State Univ, Dept Elect & Comp Engn, Raleigh, NC 27695 USA
来源：
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | 2015年 / 4卷 / 10期
基金：
美国国家科学基金会;
关键词：
OZONE; OXIDE; FILMS; SENSORS; RESISTANCE;
D O I：
10.1149/2.0111510jss
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This work demonstrates ultra-low power ozone sensors for real time, continuous, and portable monitoring. Atomic Layer Deposition (ALD) of SnO2 enables precise control of ultrathin film thickness on the order of the Debye length to enhance sensitivity at room temperature. Correlation between ozone concentration and the rate of resistance change is used to maintain fast response times and ultraviolet (UV) illumination hastens recovery. ALD SnO2 ultrathin film sensors realize room temperature operation with highly selective detection of 50 ppb ozone with average power consumption of 150 mu W making them well suited for real time, portable environmental monitoring systems. (C) The Author(s) 2015. Published by ECS. All rights reserved.
引用
收藏
页码：S3059 / S3061
页数：3
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