Step height measurements using a combination of a laser displacement gage and a broadband interferometric surface profiler

被引：10

作者：

de Groot, P ^{[1
]}

de Lega, XC ^{[1
]}

Grigg, D ^{[1
]}

机构：

[1] Zygo Corp, Middlefield, CT 06457 USA

来源：

INTERFEROMETRY XI: APPLICATIONS | 2002年 / 4778卷

关键词：

interferometry; laser gage; coherence scanning; step height; gage block;

D O I：

10.1117/12.473535

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We describe techniques for measuring step heights between separated, nominally plane-parallel surface regions of a precision-engineered part. Our technique combines a broadband, 10-micron wavelength scanning interferometric profiler with a HeNe laser displacement gage. The infrared wavelength accommodates machined metal parts having a surface roughness in excess of what would be possible with a visible-wavelength interferometer. The combination of broadband interferometry, which removes fringe order ambiguity, with a laser displacement gage makes it possible to determine the relative heights of surfaces separated by several nun with a 2-sigma uncertainty of 0.3 micron. We present the instrument theory, experimental implementation and results of instrument testing.

引用

页码：127 / 130

页数：4