Lateral metal-semiconductor-metal photodetectors based on amorphous selenium

被引:31
作者
Wang, Kai [1 ,2 ]
Chen, Feng [1 ]
Belev, George [3 ]
Kasap, Safa [3 ]
Karim, Karim S. [1 ]
机构
[1] Univ Waterloo, Dept Elect & Comp Engn, Waterloo, ON N2L 3G1, Canada
[2] Thunder Bay Reg Res Inst, Thunder Bay, ON P7A 7T1, Canada
[3] Univ Saskatchewan, Dept Elect Engn, Saskatoon, SK S7N 5A9, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
RAY; PHOTOCONDUCTOR; MAMMOGRAPHY;
D O I
10.1063/1.3173818
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report a lateral metal-semiconductor-metal (MSM) photodetector (PD) based on an amorphous selenium (a-Se). The PD exhibits a dark current below 200 fA under electric fields ranging from 6 to 12 V/mu m, a responsivity of up to 0.45 A/W, a photogain of 1.2 near short wavelengths of 468 nm, and a high-speed photoresponse with a rise time of 50 mu s, fall time of 60 mu s, and time constant of 30 mu s, respectively. The lateral MSM PD based on a-Se has great potential for use in digital x-ray imaging applications. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3173818]
引用
收藏
页数:3
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