The role of thermally-induced internal stresses on the tunability of textured barium strontium titanate films

被引:47
作者
Sharma, A
Ban, ZG
Alpay, SP [1 ]
Mantese, JV
机构
[1] Univ Connecticut, Dept Met & Mat Engn, Storrs, CT 06269 USA
[2] Univ Connecticut, Inst Mat Sci, Storrs, CT 06269 USA
[3] Delphi Res Labs, Shelby Township, MI 48315 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.1781356
中图分类号
O59 [应用物理学];
学科分类号
摘要
The tunability of highly textured thin films of barium strontium titanate (Ba0.5Sr0.5TiO3, BST) is analyzed theoretically using a Landau-Devonshire thermodynamic model. The relative dielectric constant of BST films is determined as functions of the applied external electric field, deposition temperature, and the thermal expansion coefficient of the substrate. Our analysis shows that tunability is highly dependent upon thermally induced strains within the material. Both tension and compression produce deleterious tuning response. However, this effect can be minimized through judicious choices of deposition temperature and appropriate substrate material. (C) 2004 American Institute of Physics.
引用
收藏
页码:985 / 987
页数:3
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