Orientation dependence on piezoelectric properties of Bi0.5Na0.5TiO3-BaTiO3-SrTiO3 epitaxial thin films

被引:22
|
作者
Li, Wei [1 ,2 ]
Li, Peng [1 ]
Zeng, Huarong [3 ]
Hao, Jigong [1 ,2 ]
Zhai, Jiwei [1 ]
机构
[1] Tongji Univ, Funct Mat Res Lab, Shanghai 200092, Peoples R China
[2] Liaocheng Univ, Coll Mat Sci & Engn, Liaocheng 252059, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China
基金
高等学校博士学科点专项科研基金; 中国国家自然科学基金;
关键词
LEAD-FREE PIEZOCERAMICS; ELECTRICAL-PROPERTIES; PHASE;
D O I
10.1063/1.4874805
中图分类号
O59 [应用物理学];
学科分类号
摘要
Orientation-engineered 0.755(Bi0.5Na0.5)TiO3-0.065BaTiO(3)-0.18SrTiO(3) thin films deposited on Nb doped SrTiO3 (N:STO) single crystalline (001), (110), and (111) substrates via a sol-gel process were investigated. Highly epitaxial growth was observed in the as-deposited thin films. Excellent piezoelectric properties are exhibited by the (111) oriented thin films with the highest strain level (0.32%) and local effective piezoelectric coefficient (d(33) = 210 pm/V). Strong orientation dependence of piezoelectric properties on the thin films is attributed to the relative alignment of crystallites and spontaneous polarization vector. These findings are of great significance for piezo-micro electro mechanical systems. (C) 2014 AIP Publishing LLC.
引用
收藏
页数:5
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