Monolithic vertical combdrive actuators for adaptive optics

被引：0
作者：
Milanovic, V [1 ]
Kwon, S [1 ]
Lee, LP [1 ]
机构：
[1] Adriat Res Inst, Berkeley, CA 94704 USA
来源：
2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST | 2002年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：57 / 58
页数：2
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