Experimental study of drilling sub-10 μm holes in thin metal foils with femtosecond laser pulses

被引：78

作者：

Zhu, X ^{[1
]}

Villeneuve, DM ^{[1
]}

Naumov, AY ^{[1
]}

Nikumb, S ^{[1
]}

Corkum, PB ^{[1
]}

机构：

[1] Natl Res Council Canada, Femtosci Grp, Ottawa, ON K1A 0R6, Canada

来源：

APPLIED SURFACE SCIENCE | 1999年 / 152卷 / 3-4期

关键词：

laser ablation; micro-machining; femtosecond lasers; metal foils;

D O I：

10.1016/S0169-4332(99)00331-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Aluminum foils with thickness ranging from 1.5 to 50 mu m, and W, Mo, Ti, Cu, Fe, Ag, Au, and ph foils of 25 mu m thickness have been drilled with femtosecond Ti:sapphire laser pulses centered at 800 nm. The influence of laser parameters and material properties on hole drilling processes at sub-10 mu m scale has been examined. A simple model is shown to predict the ablation rate for a range of metals. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：138 / 148

页数：11

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