Multichannel structures made from micrometre-thick plastic foils

被引：9

作者：

Prins, MWJ

Weekamp, JW

Giesbers, JB

机构：

[1] Philips Res Labs, NL-5656 AA Eindhoven, Netherlands

[2] Ctr Mfg Technol, NL-5656 AA Eindhoven, Netherlands

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1999年 / 9卷 / 04期

关键词：

D O I：

10.1088/0960-1317/9/4/312

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A method to fabricate multichannel structures based on micrometre-thick plastic foil is described. In a reel-to-reel process, metallized plastic foil is patterned by laser ablation and stacked. Foil-to-foil joints are established by heating the foil stack under pressure. Expansion of the foil stack perpendicular to the plane of the foils yields a multichannel structure. We have realized structures with many thousands of channels with a diameter of a few hundred micrometres. The multichannel structures can serve for mechanical, optical, electrical as well as chemical functions.

引用

页码：362 / 363

页数：2