Tribological properties of TiN/DLC nanocomposite coatings

被引：0
|
作者：
Yang, Won Jae
Sekino, Tohru
Yoon, Jong-Won
Shim, Kwang Bo
Niihara, Koichi
Auh, Keun Ho
机构：
[1] Osaka Univ, ISIR, Osaka 5670047, Japan
[2] Hanyang Univ, CPRC, Seoul 133791, South Korea
来源：
SCIENCE OF ENGINEERING CERAMICS III | 2006年 / 317-318卷
关键词：
TiN/DLC; nanocomposite coatings; friction; wear;
D O I：
10.4028/www.scientific.net/KEM.317-318.385
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The TiN/DLC nanocomposite coatings were grown on Si wafers using Ar/CH4/TDMAT (Ti[(CH3)(2)N](4)N-2) gas mixtures by r.f. plasma enhanced chemical vapor deposition. The sliding fiction tests were carried out using a ball-on-flat type tribometer. The different test parameters such as applied loads, counterpart materials and environment were applied to understand the tribological behavior in terms of friction and wear. The coatings provided a low friction coefficient and high wear resistance depending on the friction test conditions.
引用
收藏
页码：385 / 388
页数：4
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