Precise structure measurement using laser-based microellipsometry

被引：0
|
作者：
Holzapfel, W [1 ]
Neuschaefer-Rube, U [1 ]
Doberitzsch, J [1 ]
Wirth, F [1 ]
机构：
[1] Univ Gesamthsch Kassel, Inst Mess & Automatisierungstech, D-34109 Kassel, Germany
来源：
TECHNISCHES MESSEN | 1999年 / 66卷 / 11期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
We investigated ref lection-ellipsometric methods for high-resolution surface measurement. The topography and the material distribution are determined simultaneously by combinative evaluation of the light polarization. Scanning the surface, the focused measurement beam of a novel PSA-ellipsometer (microellipsometer) delivers the local distributions of four ellipsometric parameters. They are used to calculate the local gradient angles and the complex material refraction index. We successfully carried out tests on various surfaces.
引用
收藏
页码：455 / 462
页数：8
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