Ion beam deposition of carbon overcoats for magnetic thin film media

被引:11
|
作者
Grannen, KJ [1 ]
Ma, XD [1 ]
Thangaraj, R [1 ]
Gui, J [1 ]
Rauch, GC [1 ]
机构
[1] Seagate Technol, Recording Media Operat, Fremont, CA 94538 USA
关键词
carbon; implantation; ion beam; magnetic poisoning;
D O I
10.1109/20.824436
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ion beam deposited carbon has been investigated for its use as an overcoat for magnetic thin film media, By using a gridless end-Hall ion source, carbon has been deposited that possesses hardnesses to 18 GPa, stress to 4.5 GPa, and densities up to 2.6 g/cc. Contact-start-stop testing of ion beam deposited carbon to fifty thousand cycles shows marked improvement in failure rate compared to hydrogenated and nitrogenated carbon. Energetic deposition of carbon thin films can lead to implantation of energetic species into the magnetic layer. Simulations have been performed to assess the vulnerability of the magnetic layer to energetic implantation of carbon. In addition, the effect of the partial pressure on the magnetic performance is assessed and a critical impurity concentration defined.
引用
收藏
页码:120 / 124
页数:5
相关论文
共 50 条
  • [41] DIRECT ION-BEAM DEPOSITION FOR THIN-FILM FORMATION
    AMANO, J
    THIN SOLID FILMS, 1982, 92 (1-2) : 115 - 122
  • [42] Structure of nitrogenated carbon overcoats on thin-film hard disks
    Huang, LJ
    Hung, Y
    Chang, S
    IEEE TRANSACTIONS ON MAGNETICS, 1997, 33 (06) : 4551 - 4559
  • [43] Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition
    孙鹏
    胡明
    张锋
    季一勤
    刘华松
    刘丹丹
    冷健
    Chinese Physics B, 2015, 24 (06) : 585 - 589
  • [44] Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition
    Sun Peng
    Hu Ming
    Zhang Feng
    Ji Yi-Qin
    Liu Hua-Song
    Liu Dan-Dan
    Leng Jian
    CHINESE PHYSICS B, 2015, 24 (06)
  • [45] Organic Thin Film Transistor Memories with Carbon Nanodots Fabricated by Focused Ion Beam Chemical Vapor Deposition
    Rahim, Ruslinda A.
    Hashim, Uda
    Fukuda, Hisashi
    Tada, Yoshihiro
    Wainai, Noriyuki
    Uesugi, Katsuhiro
    Shimoyama, Yuhei
    NANOSCIENCE AND NANOTECHNOLOGY, 2009, 1136 : 297 - +
  • [46] Optical thin film deposition with O2 cluster ion beam assisted deposition
    Toyoda, N
    Yamada, I
    APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, 2003, 680 : 711 - 714
  • [47] STRUCTURE AND PROPERTIES OF SPUTTERED CARBON OVERCOATS ON RIGID MAGNETIC MEDIA DISKS
    TSAI, HC
    BOGY, DB
    KUNDMANN, MK
    VEIRS, DK
    HILTON, MR
    MAYER, ST
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1988, 6 (04): : 2307 - 2315
  • [48] TRIBOCHEMICAL EFFECTS OF VARIOUS GASES AND WATER-VAPOR ON THIN-FILM MAGNETIC DISKS WITH CARBON OVERCOATS
    STROM, BD
    BOGY, DB
    BHATIA, CS
    BHUSHAN, B
    JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 1991, 113 (04): : 689 - 693
  • [49] Ion beam induced chemical vapor deposition for the preparation of thin film oxides
    Leinen, D.
    Fernandez, A.
    Espinos, J.P.
    Belderrain, T.R.
    Gonzalez-Elipe, A.R.
    1600, Publ by Elsevier Sequoia SA, Lausanne, Switzerland (241): : 1 - 2
  • [50] COMBINED ION-BEAM DEPOSITION AND ETCHING FOR THIN-FILM STUDIES
    HARPER, JME
    GAMBINO, RJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1901 - 1905