Ion beam deposition of carbon overcoats for magnetic thin film media

被引:11
|
作者
Grannen, KJ [1 ]
Ma, XD [1 ]
Thangaraj, R [1 ]
Gui, J [1 ]
Rauch, GC [1 ]
机构
[1] Seagate Technol, Recording Media Operat, Fremont, CA 94538 USA
关键词
carbon; implantation; ion beam; magnetic poisoning;
D O I
10.1109/20.824436
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ion beam deposited carbon has been investigated for its use as an overcoat for magnetic thin film media, By using a gridless end-Hall ion source, carbon has been deposited that possesses hardnesses to 18 GPa, stress to 4.5 GPa, and densities up to 2.6 g/cc. Contact-start-stop testing of ion beam deposited carbon to fifty thousand cycles shows marked improvement in failure rate compared to hydrogenated and nitrogenated carbon. Energetic deposition of carbon thin films can lead to implantation of energetic species into the magnetic layer. Simulations have been performed to assess the vulnerability of the magnetic layer to energetic implantation of carbon. In addition, the effect of the partial pressure on the magnetic performance is assessed and a critical impurity concentration defined.
引用
收藏
页码:120 / 124
页数:5
相关论文
共 50 条
  • [21] Ultrathin amorphous C:H overcoats by pCVD on thin film media
    Yamamoto, T
    Toyoguchi, T
    Honda, F
    IEEE TRANSACTIONS ON MAGNETICS, 2000, 36 (01) : 115 - 119
  • [22] ION SOURCES FOR ION-BEAM ASSISTED THIN-FILM DEPOSITION
    ENSINGER, W
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (11): : 5217 - 5233
  • [23] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON
    AISENBERG, S
    CHABOT, R
    JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +
  • [24] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON
    AISENBERG, S
    CHABOT, R
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01): : 112 - +
  • [25] Growth of carbon thin film by low-energy mass-selected ion beam deposition
    Tokyo Natl Coll of Technology, Tokyo, Japan
    Nucl Instrum Methods Phys Res Sect B, 1-4 (673-677):
  • [26] DIAMOND-LIKE CARBON THIN-FILM FORMATION BY ION-BEAM-ASSISTED DEPOSITION
    FUNADA, Y
    AWAZU, K
    SHIMAMURA, K
    WATANABE, H
    IWAKI, M
    SURFACE & COATINGS TECHNOLOGY, 1994, 66 (1-3): : 514 - 518
  • [27] Growth of carbon thin film by low-energy mass-selected ion beam deposition
    Ohno, H
    van den Berg, JA
    Nagai, S
    Armour, DG
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1999, 148 (1-4): : 673 - 677
  • [28] Ion beam deposition of tantalum pentoxide thin film at room temperature
    Kulisch, W.
    Gilliland, D.
    Ceccone, G.
    Rauscher, H.
    Sirghi, L.
    Colpo, P.
    Rossi, F.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2008, 26 (04): : 991 - 995
  • [29] ION-BEAM TECHNIQUES FOR THIN AND THICK-FILM DEPOSITION
    WEISSMANTEL, C
    ERLER, HJ
    REISSE, G
    SURFACE SCIENCE, 1979, 86 (JUL) : 207 - 221
  • [30] Thin film deposition from dual ion beam sputtering system
    Shaibal Mukherjee
    CSI Transactions on ICT, 2019, 7 (2) : 99 - 104