Study of silver cluster formation from thin films on inert surface

被引：18

作者：

Belov, A. N. ^{[1
]}

Bulyarsky, S. V. ^{[2
]}

Gromov, D. G. ^{[1
]}

Pavlova, L. M. ^{[1
]}

Pyatilova, O. V. ^{[1
]}

机构：

[1] Natl Res Univ Elect Technol, Moscow, Russia

[2] Ulyanovsk State Univ, Ulyanovsk, Russia

来源：

CALPHAD-COMPUTER COUPLING OF PHASE DIAGRAMS AND THERMOCHEMISTRY | 2014年 / 44卷

基金：

俄罗斯基础研究基金会;

关键词：

Thin film; Nanocluster; Dispersion; Gibbs energy; Entropy; AGGLOMERATION BEHAVIOR; METAL NANOPARTICLES; SILICON; CELLS;

D O I：

10.1016/j.calphad.2013.07.017

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

We investigated the evolution of 6-130 nm silver thin films during vacuum annealing. The bimodal character of cluster size distribution was observed for 12-130 nm films. One average cluster size is 40-80 nm, other average size is 380-420 nm. At the same time it is shown that two simultaneous processes occur: coalescence and evaporation. The bimodality distribution character is associated with these two simultaneous processes. The initial 6 nm Ag film is found to be not continuous and to consist of aggregates of stuck clusters. The heating of this film up to 230 degrees C leads to the separation of clusters and unimodal character of cluster size distribution (average cluster size is up to 10 nm). The differences in behavior of 6-130 nm Ag thin films are discussed in terms of classical nucleation theory. (C) 2013 Elsevier Ltd. All rights reserved.

引用

页码：138 / 141

页数：4

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