共 21 条
[3]
Cakmaktepe S, 2013, LITH J PHYS, V53, P112
[4]
Fitzpatrick ME., 2005, MEASUREMENT GOOD PRA
[6]
Hammond C., 2009, BASICS CRYSTALLOGRAP, V3rd ed.
[9]
Origin of stresses in sputtered elemental and alloy thin films
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1996, 14 (04)
:2169-2174