Thin Film Metamaterial Split Ring Resonators at Microwave Frequencies

In this paper we present a metamaterial Split Ring Resonator (SRR) made of thin films of nanometer thickness working in microwave frequencies. Since the thickness of nano-film used for fabricating metamaterial structures is below the skin depth, unique resonance behavior is observed in comparison to the resonance curves of its conventional counterpart made with thick films. At thickness less than skin depth, the film becomes resistive which in turn results in a wide band magnetic resonance. Silver thin film resonators of thickness 350 nm, 550 nm and 750 nm prepared on glass substrates using RF sputtering technique are used for the study. Absorption characteristics of the SRR and Broad-side Coupled SRR (BCSRR) are analyzed.