Displacement measurements using a self-mixing laser diode under moderate feedback

被引：193
作者：
Bes, Caroline [1 ]
Plantier, Guy
Bosch, Thierry
机构：
[1] ENSEEIHT LEN7, F-31071 Toulouse, France
[2] Ecole Super Elect Ouest, F-49009 Angers, France
来源：
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 2006年 / 55卷 / 04期
关键词：
displacement measurement; optical feedback interferometry; optical sensor; semiconductor laser; signal processing;
D O I：
10.1109/TIM.2006.876544
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A semiconductor laser subject to moderate optical feedback has been used to design an interferometric displacement sensor. The autoadaptative signal processing presented in this paper has been computed in order to improve the accuracy of such a sensor. This setup has been successfully tested for both harmonic and aleatory displacements of a remote piezoelectric actuator with a maximum accuracy of 40 nm.
引用
收藏
页码：1101 / 1105
页数：5
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