Improving Accuracy of Sample Surface Topography by Atomic Force Microscopy

We describe method for improving the accuracy of sample surface topography by atomic force microscopy (AFM). It takes into account the effect of the AFM tip shape and image reconstruction on the acquired AFM images. The dilation effect due to the use of a finite-sized tip shape can be minimized by using a sharp AFM tip and scanning at the most symmetric direction of tip geometry. Reconstruction of AFM image could produce more accurate sample surface features. The method is useful to AFM measurement and is significant because AFM has become a fundamental tool in nanoscience and nanotechnology with multiple applications in a wide range of disciplines ranging from biology to physics and material science.