Ion-beam modifiction of semiconductors and related electronic materials

被引：0
|
作者：
Elliman, RG
机构：
来源：
MATERIALS SCIENCE APPLICATIONS OF ION BEAM TECHNIQUES | 1997年 / 248-2卷
关键词：
ion-implantation; semiconductors; electronic materials; optoelectronics;
D O I：
10.4028/www.scientific.net/MSF.248-249.67
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper reviews the ion-implantation research program at the Australian National University. The emphasis of the research is on the modification and analysis of semiconductors and related electronic and optoelectronic materials, and includes both device and materials based studies. These are discussed under the headings: a) solid-phase epitaxy, b) defect engineering, doping and gettering, c) the synthesis of alloys and compounds, and d) optical materials.
引用
收藏
页码：67 / 72
页数：6
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