Multiphysical Analysis of Moving-Magnet Planar Motor Topologies

Moving-magnet magnetically levitated planar motors are considered for use as a wafer stage in the semiconductor lithographic industry. This puts high requirements on the accuracy and the dissipated power and cooling performance of such motors. The goal of this paper is to analyze the multi-physical behavior of three moving-magnet planar topologies using an electromagnetic model, a mechanical model, and a thermal model. This behavior is evaluated using a trajectory and performance criteria which are representative for the application. The static and dynamic behavior are evaluated.