Highly Sensitive Tactile Sensing Array Realized Using a Novel Fabrication Process With Membrane Filters

被引：19

作者：

Ma, Cheng-Wen ^{[1
]}

Chang, Chia-Ming ^{[1
]}

Lin, Ting-Hao ^{[1
]}

Yang, Yao-Joe Joseph ^{[1
]}

机构：

[1] Natl Taiwan Univ, Dept Mech Engn, Taipei 10617, Taiwan

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2015年 / 24卷 / 06期

关键词：

Carbon nanotubes; conductive polymer; membrane filter; polydimethylsiloxane (PDMS); tactile sensor; ELECTRONIC SKIN; SENSORS; PRESSURE; POLYMER;

D O I：

10.1109/JMEMS.2015.2469252

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a highly sensitive tactile sensing array. Sensing elements of the array comprise multiwall carbon nanotubes and polydimethylsiloxane polymer. A novel lithography process is proposed for fabricating an SU-8 mold for shaping the sensing cells in the array. In addition, a nylon membrane filter is proposed to serve as a mold for numerous microdome patterns, which were transferred onto a conductive polymer film. The proposed device features advantages, such as ultra-high sensitivity, flexibility, and a simple fabrication process. Tunneling piezoresistive effects of interlocked microdome structures fabricated using membrane filters with different pore sizes were observed. The measured maximum sensitivity and typical response time were approximately -7.73 kPa(-1) and 4 ms, respectively. In addition, the measured results show that the patterned polymer composite arranged in a row-column array can effectively eliminate the crosstalk effect. Moreover, measurements for various tactile sensing applications were demonstrated. [2015-0118]

引用

页码：2062 / 2070

页数：9

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