Structure control of carbon nanotubes using radio-frequency plasma enhanced chemical vapor deposition

被引：29

作者：

Kato, T ^{[1
]}

Jeong, GH ^{[1
]}

Hirata, T ^{[1
]}

Hatakeyama, R ^{[1
]}

机构：

[1] Tohoku Univ, Grad Sch Engn, Sendai, Miyagi 9808579, Japan

来源：

THIN SOLID FILMS | 2004年 / 457卷 / 01期

关键词：

carbon nanotube; plasma enhanced chemical vapor deposition; zeolites; sputtering;

D O I：

10.1016/j.tsf.2003.12.002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Carbon nanotube structures such as tube diameter, growth site, and formation density are controlled using radio-frequency (RF, 13.56 MHz) plasma enhanced chemical vapor deposition (RF-PECVD) method. We have produced uniformly well-aligned multiwalled carbon nanotubes (MWNTs) grown over the large scale area and linearly arrayed MWNTs grown in a selected area without any highly-sophisticated patterning process. In our RF-PECVD experiment, furthermore, individually grown single-walled carbon nanotubes (SWNTs) or their thin bundles are synthesized for the first time within the scope of the PECVD methods. These results indicate that PECVD method provides the high potential for the further development of nano-technology. (C) 2003 Elsevier B.V All rights reserved.

引用

页码：2 / 6

页数：5

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