Fabrication and Performance Evaluation of Pixelated Nano-wire Grid Polarizer

被引：19

作者：

Gao, Shengkui ^{[1
]}

Njuguna, Raphael ^{[1
]}

Gruev, Viktor ^{[1
]}

机构：

[1] Washington Univ, Dept Comp Sci & Engn, St Louis, MO 63130 USA

来源：

POLARIZATION SCIENCE AND REMOTE SENSING VI | 2013年 / 8873卷

关键词：

Polarization; linear polarizer; nano-wire; lithography; DoFP;

D O I：

10.1117/12.2023115

中图分类号：

TP7 [遥感技术];

学科分类号：

081102 ; 0816 ; 081602 ; 083002 ; 1404 ;

摘要：

Metal-based nano-wire grid polarizer (NWGP) is widely used in division of focal plane (DoFP) imaging sensors to capture polarization information of the imaged environment. In this paper, we present a procedure for fabricating aluminum pixelated NWGP structures using electron beam lithography (EBL) and reactive ion etching (RIE). We evaluate optical performance of the NWGP structures in terms of different orientations (0 degrees, 45 degrees, 90 degrees, 135 degrees), line widths (50nm to 500nm), and spectral response (460nm to 625nm).

引用

页数：7

共 7 条

[1] Fabrication of a 50 nm half-pitch wire grid polarizer using nanoimprint lithography [J].

Ahn, SW ;

Lee, KD ;

Kim, JS ;

Kim, SH ;

Park, JD ;

Lee, SH ;

Yoon, PW .

NANOTECHNOLOGY, 2005, 16 (09) :1874-1877

[2]

Goldstein D H, 2010, POLARIZED LIGHT, DOI DOI 10.1201/B10436

[3] Fabrication of a dual-layer aluminum nanowires polarization filter array [J].

Gruev, Viktor .

OPTICS EXPRESS, 2011, 19 (24) :24361-24369

[4] CCD polarization imaging sensor with aluminum nanowire optical filters [J].

Gruev, Viktor ;

Perkins, Rob ;

York, Timothy .

OPTICS EXPRESS, 2010, 18 (18) :19087-19094

[5] Polarization Analyzing Image Sensor with On-Chip Metal Wire Grid Polarizer in 65-nm Standard Complementary Metal Oxide Semiconductor Process [J].

Shishido, Sanshiro ;

Noda, Toshihiko ;

Sasagawa, Kiyotaka ;

Tokuda, Takashi ;

Ohta, Jun .

JAPANESE JOURNAL OF APPLIED PHYSICS, 2011, 50 (04)

[6]

Wang J. J., 2007, APPL PHYS LETT, V90

[7] Calibration Method for Division of Focal Plane Polarimeters in the Optical and Near Infrared Regime [J].

York, Timothy ;

Gruev, Viktor .

INFRARED TECHNOLOGY AND APPLICATIONS XXXVII, 2011, 8012

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