Fabrication of Large Area Diffractive Optical Elements by Laser Direct Writing

被引：0

作者：

Wang, Yunjiao ^{[1
]}

Zhang, Weiguo ^{[1
]}

Yang, Zheng ^{[1
]}

Xiong, Xin ^{[1
]}

Xia, Liangping ^{[1
]}

Gao, Mingyou ^{[1
]}

Zhang, Dong ^{[1
]}

Wang, Deqiang ^{[1
]}

Yuan, Jiahu ^{[1
]}

机构：

[1] Chinese Acad Sci, Chongqing Key Lab Multiscale Mfg Technol, Chongqing Inst Green & Intelligent Technol, Chongqing 400714, Peoples R China

来源：

2016 6TH IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (IEEE 3M-NANO) | 2016年

基金：

中国科学院西部之光基金; 中国国家自然科学基金;

关键词：

laser direct writing; diffractive optical elements; grayscale lithography;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We present a method to fabricate diffractive optical elements (DOEs) with four phase levels by the Laser Direct Writing technology. One computation method is provided to optimize the step depth, which could improve efficiency of DOEs. The step depth and imaging results demonstrate the fabricated DOEs devices with good optical properties. The effective areas of the DOEs pattern are as large as 49 cm(2), which could be replicated easily for mass production applications.

引用

页码：51 / 54

页数：4

共 13 条

[1] Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass [J].