OPTICAL INTERFERENCE METHODS OF SUBWAVELENGTH-RESOLUTION IMAGING

被引:10
作者
Kozhevatov, I. E. [1 ]
Silin, D. E. [1 ]
机构
[1] Russian Acad Sci, Inst Appl Phys, Nizhnii Novgorod 603600, Russia
基金
美国国家科学基金会;
关键词
MICROSCOPY; SUPERLENS;
D O I
10.1007/s11141-009-9103-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present two novel optical interference methods for measuring characteristics of surfaces with subwavelength resolution. One method is based on recording interferograms of the light near field which comprises information on the subwavelength structure of the surface. The idea of the other method is to transform the near field to propagated waves and measure their parameters far from the studied surface. The proposed methods have been tested by numerical simulation.
引用
收藏
页码:67 / 77
页数:11
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