Colliding laser-produced plasmas as targets for laser-generated extreme ultraviolet sources

被引：28

作者：

Cummins, T. ^{[1
]}

O'Gorman, C. ^{[1
]}

Dunne, P. ^{[1
]}

Sokell, E. ^{[1
]}

O'Sullivan, G. ^{[1
]}

Hayden, P. ^{[1
,2
,3
]}

机构：

[1] Natl Univ Ireland Univ Coll Dublin, Sch Phys, Dublin 4, Ireland

[2] Dublin City Univ, Sch Phys Sci, Dublin 9, Ireland

[3] Dublin City Univ, Natl Ctr Plasma Sci & Technol, Dublin 9, Ireland

来源：

APPLIED PHYSICS LETTERS | 2014年 / 105卷 / 04期

基金：

爱尔兰科学基金会;

关键词：

LITHOGRAPHY;

D O I：

10.1063/1.4891762

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Colliding plasmas produced by neodymium-doped yttrium aluminium garnet (Nd:YAG) laser illumination of tin wedge targets form stagnation layers, the physical parameters of which can be controlled to optimise coupling with a carbon dioxide (CO2) heating laser pulse and subsequent extreme ultraviolet (EUV) production. The conversion efficiency (CE) of total laser energy into EUV emission at 13.5 nm +/- 1% was 3.6%. Neglecting both the energy required to form the stagnation layer and the EUV light produced before the CO2 laser pulse is incident results in a CE of 5.1% of the CO2 laser energy into EUV light. (C) 2014 AIP Publishing LLC.

引用

页数：4

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